Method and Apparatus for Wafer Electroless Plating

ABSTRACT

A semiconductor wafer electroless plating apparatus includes a platen and a fluid bowl. The platen has a top surface defined to support a wafer, and an outer surface extending downward from a periphery of the top surface to a lower surface of the platen. The fluid bowl has an inner volume defined by an interior surface so as to receive the platen, and wafer to be supported thereon, within the inner volume. A seal is disposed around the interior surface of the fluid bowl so as to form a liquid tight barrier when engaged between the interior surface of the fluid bowl and the outer surface of the platen. A number of fluid dispense nozzles are positioned to dispense electroplating solution within the fluid bowl above the seal so as to rise up and flow over the platen, thereby flowing over the wafer when present on the platen.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is related to U.S. patent application Ser. No. ______(Attorney Docket No. LAM2P608.1), filed on even date herewith, entitled“Wafer Electroless Plating System and Associated Methods,” and U.S.patent application Ser. No. ______ (Attorney Docket No. LAM2P608.3),filed on even date herewith, entitled “Fluid Handling System for WaferElectroless Plating and Associated Methods,” and U.S. patent applicationSer. No. 11/639,752, filed on Dec. 15, 2006, entitled “ControlledAmbient System for Interface Engineering,” and U.S. Pat. No. 7,045,018,entitled “Substrate Brush Scrubbing and Proximity Cleaning-DryingSequence Using Compatible Chemistries, and Method, Apparatus, and Systemfor Implementing the Same,” and U.S. patent application Ser. No.11/016,381, filed on Dec. 16, 2004, entitled “System Method andApparatus for Dry-in, Dry-out Low Defect Laser Dicing Using ProximityTechnology,” and U.S. patent application Ser. No. 10/882,716, filed onJun. 30, 2004, entitled “Proximity Substrate Preparation Sequence, andMethod, Apparatus, and System for Implementing the Same,” and U.S.patent application Ser. No. 11/382,906, filed on May 11, 2006, entitled“Plating Solution for Electroless Deposition of Copper,” and U.S. patentapplication Ser. No. 11/427,266, filed on Jun. 28, 2006, entitled“Plating Solutions for Electroless Deposition of Copper,” and U.S.patent application Ser. No. 11/639,012, filed on Dec. 13, 2006, entitled“Self Assembled Monolayer for Improving Adhesion Between Copper andTantalum,” and U.S. patent application Ser. No. 11/591,310, filed onOct. 31, 2006, entitled “Methods of Fabricating a Barrier Layer withVarying Composition for Copper Metallization,” and U.S. patentapplication Ser. No. 11/552,794, filed on Oct. 25, 2006, entitled“Apparatus and Method for Substrate Electroless Plating,” and U.S. Pat.No. 7,153,400, entitled “Apparatus and Method for Depositing andPlanarizing Thin Films of Semiconductor Wafers,” and U.S. patentapplication Ser. No. 11/539,155, filed on Oct. 5, 2006, entitled“Electroless Plating Method and Apparatus,” and U.S. patent applicationSer. No. 11/611,758, filed on Dec. 15, 2006, entitled “Method for GapFill in Controlled Ambient System.” The disclosure of each of theabove-identified related applications is incorporated herein byreference.

BACKGROUND OF THE INVENTION

In the fabrication of semiconductor devices such as integrated circuits,memory cells, and the like, a series of manufacturing operations areperformed to define features on semiconductor wafers (“wafers”). Thewafers include integrated circuit devices in the form of multi-levelstructures defined on a silicon substrate. At a substrate level,transistor devices with diffusion regions are formed. In subsequentlevels, interconnect metallization lines are patterned and electricallyconnected to the transistor devices to define a desired integratedcircuit device. Also, patterned conductive layers are insulated fromother conductive layers by dielectric materials.

To build an integrated circuit, transistors are first created on thesurface of the wafer. The wiring and insulating structures are thenadded as multiple thin-film layers through a series of manufacturingprocess steps. Typically, a first layer of dielectric (insulating)material is deposited on top of the formed transistors. Subsequentlayers of metal (e.g., copper, aluminum, etc.) are formed on top of thisbase layer, etched to create the conductive lines that carry theelectricity, and then filled with dielectric material to create thenecessary insulators between the lines.

Although copper lines are typically comprised of a PVD seed layer (PVDCu) followed by an electroplated layer (ECP Cu), electroless chemistriesare under consideration for use as a PVD Cu replacement, and even as aECP Cu replacement. Electroless copper (Cu) and electroless cobalt (Co)are potential techniques for improving interconnect reliability andperformance. Electroless Cu can be used to form a thin conformal seedlayer on a conformal barrier to optimize a gapfill process and minimizevoid formation. Further, deposition of a selective Co capping layer onplanarized Cu lines can improve adhesion of the dielectric barrier layerto the Cu lines, and suppress void formation and propagation at theCu-dielectric barrier interface.

During the electroless plating process, electrons are transferred from areducing agent to the Cu (or Co) ions in the solution resulting in thedeposition of reduced Cu (or Co) onto the wafer surface. The formulationof the electroless copper plating solution is optimized to maximize theelectron transfer process involving the Cu (or Co) ions in solution. Theplating thickness achieved through the electroless plating process isdependent on the residency time of the electroless plating solution onthe wafer. Because the electroless plating reactions occur immediatelyand continuously upon exposure of the wafer to the electroless platingsolution, it is desirable to perform the electroless plating process ina controlled manner and under controlled conditions. To this end, a needexists for an improved electroless plating apparatus.

SUMMARY OF THE INVENTION

In one embodiment, a semiconductor wafer electroless plating apparatusis disclosed. The apparatus includes a platen having a top surfacedefined to support a wafer. The platen also includes an outer surfaceextending downward from a periphery of the top surface of the platen toa lower surface of the platen. The apparatus also includes a fluid bowlhaving an inner volume defined by an interior surface. The fluid bowl isconfigured to receive the platen and wafer to be supported thereonwithin its inner volume. A seal is disposed around the interior surfaceof the fluid bowl so as to form a liquid tight barrier when engagedbetween the interior surface of the fluid bowl and the outer surface ofthe platen. Additionally, a number of fluid dispense nozzles arepositioned to dispense electroplating solution within the fluid bowl ata number of respective locations above the seal.

In another embodiment, a system for semiconductor wafer electrolessplating is disclosed. The system includes a platen defined to have anupper surface for supporting a wafer and an outer surface extendingdownward from the upper surface. The system also includes a fluid bowldefined to receive the platen and wafer to be supported thereon, so asto form a liquid retaining volume between an inner surface of the fluidbowl and the outer surface of the platen. A number of fluid dispensenozzles are also defined to dispense fluid within the liquid retainingvolume at locations below the upper surface of the platen. The systemfurther includes a fluid handling system in fluid communication with thenumber of fluid dispense nozzles. The fluid handling system is definedto flow an electroless plating solution to and through the number offluid dispense nozzles, so as to fill the liquid retaining volume withthe electroless plating solution and cause the electroless platingsolution to rise up and flow over the platen, so as to flow over a waferto be supported on the upper surface of the platen.

In another embodiment, a method is disclosed for semiconductor waferelectroless plating. In the method, a wafer is supported on a platen.Also, an electroless plating solution is dispensed within a liquidretaining volume defined around the platen and at a location below thewafer. The electroless plating solution is dispensed to fill the liquidretaining volume and rise up and flow over a top surface of the wafer ina substantially uniform manner extending inward from a periphery of thetop surface of the wafer to a center of the top surface of the wafer.The method also includes an operation for draining the electrolessplating solution from the liquid retaining volume so as to remove mostof the electroless plating solution from the top surface of the wafer.The top surface of the wafer is rinsed immediately upon draining theelectroless plating solution from the liquid retaining volume.

Other aspects and advantages of the invention will become more apparentfrom the following detailed description, taken in conjunction with theaccompanying drawings, illustrating by way of example the presentinvention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an illustration showing an isometric view of a dry-in/dry-outelectroless plating chamber, in accordance with one embodiment of thepresent invention;

FIG. 2 is an illustration showing a vertical cross-section through acenter of the chamber, in accordance with one embodiment of the presentinvention;

FIG. 3 is an illustration showing a top view of the chamber with theupper prox head extended to the center of the wafer, in accordance withone embodiment of the present invention;

FIG. 4 is an illustration showing a top view of the chamber with theupper prox head retracted to the home position over the prox headdocking station, in accordance with one embodiment of the presentinvention;

FIG. 5 is an illustration showing a vertical cross-section through theplaten and fluid bowl with the platen in a fully lowered position, inaccordance with one embodiment of the present invention;

FIG. 6A is an illustration showing the wafer in the wafer handoffposition within the chamber, in accordance with one embodiment of thepresent invention;

FIG. 6B is an illustration showing the platen raised to the waferhandoff position, in accordance with one embodiment of the presentinvention;

FIG. 6C is an illustration showing the platen in the hovering positionjust above the sealing position, in accordance with one embodiment ofthe present invention;

FIG. 6D is an illustration showing the platen lowered to engage thefluid bowl seal following completion of the stabilizing flow, inaccordance with one embodiment of the present invention;

FIG. 6E is an illustration showing the wafer undergoing the rinsingprocess, in accordance with one embodiment of the present invention;

FIG. 6F is an illustration showing the wafer undergoing a drying processby way of the upper and lower prox heads, in accordance with oneembodiment of the present invention;

FIG. 7 is an illustration showing an exemplary process that may beconducted by a prox head, in accordance with one embodiment of thepresent invention; and

FIG. 8 is an illustration showing a cluster architecture, in accordancewith one embodiment of the present invention.

DETAILED DESCRIPTION

In the following description, numerous specific details are set forth inorder to provide a thorough understanding of the present invention. Itwill be apparent, however, to one skilled in the art that the presentinvention may be practiced without some or all of these specificdetails. In other instances, well known process operations have not beendescribed in detail in order not to unnecessarily obscure the presentinvention.

FIG. 1 is an illustration showing an isometric view of a dry-in/dry-outelectroless plating chamber 100 (“chamber 100” hereafter), in accordancewith one embodiment of the present invention. The chamber 100 is definedto receive a wafer in a dry state, perform an electroless platingprocess on the wafer, perform a rinsing process on the wafer, perform adrying process on the wafer, and provide the processed wafer in a drystate. The chamber 100 is capable of performing essentially any type ofelectroless plating process. For example, the chamber 100 is capable ofperforming an electroless Cu or Co plating process on the wafer.Additionally, the chamber 100 is configured to be integrated within amodular wafer processing system. For example, in one embodiment, thechamber 100 is connected with a managed atmospheric transfer module(MTM). For additional information regarding the MTM, reference can bemade to U.S. patent application Ser. No. 11/639,752, filed on Dec. 15,2006, and entitled “Controlled Ambient System for InterfaceEngineering,” which is incorporated herein by reference.

For more information on electroless plating, reference can be made to:(1) U.S. patent application Ser. No. 11/382,906, filed on May 11, 2006,entitled “Plating Solution for Electroless Deposition of Copper,” (2)U.S. patent application Ser. No. 11/427,266, filed on Jun. 28, 2006,entitled “Plating Solutions for Electroless Deposition of Copper,” (3)U.S. patent application Ser. No. 11/639,012, filed on Dec. 13, 2006,entitled “Self Assembled Monolayer for Improving Adhesion Between Copperand Tantalum,” (4) U.S. patent application Ser. No. 11/591,310, filed onOct. 31, 2006, entitled “Methods of Fabricating a Barrier Layer withVarying Composition for Copper Metallization,” (5) U.S. patentapplication Ser. No. 11/552,794, filed on Oct. 25, 2006, entitled“Apparatus and Method for Substrate Electroless Plating,” (6) U.S. Pat.No. 7,153,400, entitled “Apparatus and Method for Depositing andPlanarizing Thin Films of Semiconductor Wafers,” (7) U.S. patentapplication Ser. No. 11/539,155, filed on Oct. 5, 2006, entitled“Electroless Plating Method and Apparatus,” and (8) U.S. patentapplication Ser. No. 11/611,758, filed on Dec. 15, 2006, entitled“Method for Gap Fill in Controlled Ambient System,” each of which isincorporated herein by reference.

The chamber 100 is equipped to receive a wafer in a dry state from aninterfacing module, such as the MTM. The chamber 100 is equipped toperform an electroless plating process on the wafer within the chamber100. The chamber 100 is defined to perform a drying process on the waferwithin the chamber 100. The chamber 100 is defined to provide the waferin a dry state back to the interfacing module. It should be appreciatedthat the chamber 100 is defined to perform the electroless platingprocess and the drying process on the wafer within a common internalvolume of the chamber 100. Additionally, a fluid handling system (FHS)is provided to support the wafer electroless plating process and thewafer drying process within the common internal volume of the chamber100.

The chamber 100 includes a first wafer processing zone defined within anupper region of an internal volume of the chamber 100. The first waferprocessing zone is equipped to perform the drying process on the waferwhen disposed within the first wafer processing zone. The chamber 100also includes a second wafer processing zone defined within a lowerregion of the internal volume of the chamber 100. The second waferprocessing zone is equipped to perform the electroless plating processon the wafer when disposed within the second wafer processing zone.Additionally, the chamber 100 includes a platen that is verticallymovable between the first and second wafer processing zones within theinternal volume of the chamber 100. The platen is defined to transportthe wafer between the first and second processing zones and support thewafer within the second processing zone during the electroless platingprocess.

With regard to FIG. 1, the chamber 100 is defined by outer structurewalls 103 including an outer structural bottom and a structural top 105.The outer structure of the chamber 100 is capable of resisting forcesassociated with a sub-atmospheric pressure, i.e., vacuum, conditionwithin the internal volume of the chamber 100. The outer structure ofthe chamber 100 is also capable of resisting forces associated with anabove-atmospheric pressure condition within the internal volume of thechamber 100. In one embodiment, the structural top 105 of the chamber isequipped with a window 107A. Additionally, in one embodiment a window107B is provided in an outer structural wall 103 of the chamber. Itshould be understood, however, that the windows 107A and 107B are notcritical to the operation of the chamber 100. For example, in oneembodiment, the chamber 100 is defined without windows 107A and 107B.

The chamber 100 is defined to sit atop a frame assembly 109. It shouldbe understood that other embodiments may utilize a frame assembly thatis different from the exemplary frame assembly 109 depicted in FIG. 1.The chamber 100 is defined to include an entry door 101 through which awafer is inserted into and removed from the chamber 100. The chamber 100further includes a stabilizer assembly 305, a platen lift assembly 115,and a proximity head drive mechanism 113, each of which will bedescribed in more detail below.

FIG. 2 is an illustration showing a vertical cross-section through acenter of the chamber 100, in accordance with one embodiment of thepresent invention. The chamber 100 is defined such that when a wafer 207is inserted through the entry door 101, the wafer 207 will be engaged bya drive roller assembly 303 (not shown) and the stabilizer assembly 305within the upper region of the chamber internal volume. By way of theplaten lift assembly 115, a platen 209 is defined to travel in avertical direction between the upper and lower regions of the chamberinternal volume. The platen 209 is defined to receive the wafer 207 fromthe drive roller assembly 303 and stabilizer assembly 305, and move thewafer 207 to the second wafer processing zone in the lower region of thechamber internal volume. As will be described in more detail below,within the lower region of the chamber, the platen 209 is defined tointerface with a fluid bowl 211 to enable the electroless platingprocess.

Following the electroless plating process within the lower region of thechamber, the wafer 207 is lifted via the platen 209 and platen liftassembly 115 back to the position where it can be engaged by the driveroller assembly 303 and the stabilizer assembly 305. Once securelyengaged by the drive roller assembly 303 and the stabilizer assembly305, the platen 209 is lowered to a position within the lower region ofthe chamber 100. The wafer 207, having been subjected to the electrolessplating process, is then dried by way of an upper proximity (“prox”hereafter) head 203 and a lower prox head 205. The upper prox head 203is defined to dry an upper surface of the wafer 207. The lower prox headis defined to dry a lower surface of the wafer 207.

By way of the prox head drive mechanism 113, the upper and lower proxheads 203/205 are defined to move in a linear manner across the wafer207 when the wafer 207 is engaged by the drive roller assembly 303 andthe stabilizer assembly 305. In one embodiment, the upper and lower proxheads 203/205 are defined to move to a center of the wafer 207 as thewafer 207 is rotated by the drive roller assembly 303. In this manner,the wafer 207 upper and lower surfaces can be completely exposed to theupper and lower prox heads 203/205, respectively. The chamber 100further includes a prox head docking station 201 for receiving each ofthe upper and lower prox heads 203/205 when retracted to their homeposition. The prox head docking station 201 also provides for a smoothtransition of the meniscus associated with each of the upper and lowerprox heads 203/205 as the meniscus transitions onto the wafer 207. Theprox head docking station 201 is positioned within the chamber so as toensure that when the upper and lower prox heads 203/205 are retracted totheir respective home positions, the upper and lower prox heads 203/205do not interfere with the drive roller assembly 303, the stabilizerassembly 305, or the platen 209 when raised to receive the wafer 207.

FIG. 3 is an illustration showing a top view of the chamber with theupper prox head 203 extended to the center of the wafer 207, inaccordance with one embodiment of the present invention. FIG. 4 is anillustration showing a top view of the chamber with the upper prox head203 retracted to the home position over the prox head docking station201, in accordance with one embodiment of the present invention. Aspreviously mentioned, when the wafer 207 is received within the chamber100 through the entry door 101, the wafer is engaged and held by thedrive roller assembly 303 and the stabilizer assembly 305. By way of theprox head drive mechanism 113, the upper prox head 203 can be moved in alinear manner from its home position on the prox head docking station201 to the center of the wafer 207. Similarly, by way of the prox headdrive mechanism 113, the lower prox head 205 can be moved in a linearmanner from its home position on the prox head docking station 201 tothe center of the wafer 207. In one embodiment, the prox head drivemechanism 113 is defined to move the upper and lower prox heads 203/205together from the prox head docking station 201 to the center of thewafer 207.

As shown in FIG. 3, the chamber 100 is defined by the outer structuralwalls 103 and an inner liner 301. Thus, the chamber 100 incorporates adouble-wall system. The outer structural walls 103 have sufficientstrength to provide a vacuum capability within the chamber 100 andthereby form a vacuum boundary. In one embodiment, the outer structuralwalls 103 are formed of a structural metal such as stainless steel. Itshould be understood, however, that essentially any other structuralmaterial having appropriate strength characteristics can be used to formthe outer structural walls 103. The outer structural walls 103 are alsodefined with sufficient precision to enable interfacing of the chamber100 with another module, such as the MTM.

The inner liner 301 provides a chemical boundary and acts as a separatorto keep chemicals within the chamber from reaching the outer structuralwalls 103. The inner liner 301 is formed of an inert material that ischemically compatible with the various chemicals that may be presentwithin the chamber 100. In one embodiment, the inner liner 301 is formedof an inert plastic material. It should be understood, however, thatessentially any other chemically inert material that can beappropriately shaped can be used to form the inner liner 301. It shouldalso be understood that the inner liner 301 is not required to provide avacuum boundary. As previously mentioned, the outer structural walls 103are defined to provide the vacuum boundary. Additionally, in oneembodiment, the inner liner 301 can be removed from the chamber 100 tofacilitate cleaning or to simply be replaced with a new inner liner 301.

The chamber 100 is defined to be ambient controlled to facilitate thewafer electroless plating process and protect the wafer surface fromundesirable reactions, e.g., oxidation. To this end, the chamber 100 isequipped with an internal pressure control system and an internal oxygencontent control system. In one embodiment, the chamber 100 is capable ofbeing pumped down to a pressure of less than 100 mTorr. In oneembodiment, it is anticipated that the chamber 100 will be operated atapproximately 700 Torr.

It should be appreciated that the oxygen concentration within thechamber 100 internal volume is an important process parameter. Morespecifically, a low oxygen concentration is required in the waferprocessing environment to ensure that undesirable oxidation reactionsare avoided at the wafer surface. It is anticipated that the oxygenconcentration within the chamber 100 internal volume will be maintainedat a level less than 2 ppm (parts per million) when the wafer is presentwithin the chamber 100. The oxygen concentration within the chamber 100is reduced by evacuating the chamber, by way of a vacuum source plumbedto the internal volume of the chamber 100, and refilling the chamber 100internal volume with high purity nitrogen. Therefore, the oxygenconcentration within the chamber 100 internal volume is reduced fromatmospheric levels, i.e., about 20% oxygen, by pumping the chamber 100internal volume down to a low pressure and refilling the chamber 100internal volume with ultra pure nitrogen which has a negligible oxygencontent. In one embodiment, pumping the chamber 100 internal volume downto 1 Torr and refilling it to atmospheric pressure with ultra purenitrogen three times should bring the oxygen concentration within thechamber 100 internal volume down to about 3 ppm.

The electroless plating process is a temperature sensitive process.Therefore, it is desirable to minimize the influence of the chamber 100internal volume ambient conditions on the temperature of the electrolessplating solution when present on the wafer surface. To this end, thechamber 100 is defined such that gases can be introduced into thechamber 100 internal volume through air gaps present between the outerstructural walls 103 and the inner liner 301, so as to avoid flowing ofgases directly over the wafer. It should be appreciated that a flow ofgas directly over the wafer when electroless plating solution is presenton the wafer surface could cause an evaporative cooling effect thatwould reduce the temperature of the electroless plating solution presenton the wafer, and correspondingly modify the electroless platingreaction rate. In addition to the capability of indirectly introducinggas into the chamber 100 internal volume, the chamber 100 is alsoequipped to allow a vapor pressure within the chamber 100 internalvolume to be raised to a saturated state when the electroless platingsolution is applied over the wafer surface. With the chamber 100internal volume in a saturated state relative to the electroless platingsolution, the above-mentioned evaporative cooling effect would beminimized.

With reference back to FIGS. 3 and 4, the stabilizer assembly 305includes a stabilizer roller 605 that is defined to apply pressure tothe edge of the wafer 207 so as to hold the wafer 207 in the driveroller assembly 303. Thus, the stabilizer roller 605 is defined toengage the edge of the wafer 207. The stabilizer roller 605 profile isdefined to accommodate an amount of angular misalignment between thestabilizer roller 605 and the wafer 207. Also, the stabilizer assembly305 is defined to enable mechanical adjustment of the stabilizer roller605 vertical position. The stabilizer assembly 305 shown in FIG. 6includes a single stabilizer roller 605 to accommodate a 200 mm wafer.In another embodiment, the stabilizer assembly 305 can be defined withtwo stabilizer rollers 605 to accommodate a 300 mm wafer.

Also with reference back to FIGS. 3 and 4, the drive roller assembly 303includes a pair of drive rollers 701 defined to engage the edge of thewafer 207 and rotate the wafer 207. Each of the drive rollers 701 isdefined to engage the edge of the wafer 207. The profile of each driveroller 701 is defined to accommodate an amount of angular misalignmentbetween the drive roller 701 and the wafer 207. Also, the drive rollerassembly 303 is defined to enable mechanical adjustment of the verticalposition of each drive roller 701. The drive roller assembly 303 iscapable of moving the drive rollers 701 toward and away from the edge ofthe wafer 207. Engagement of the stabilizer roller 605 with the edge ofthe wafer 207 will cause the drive rollers 701 to engage the edge of thewafer 207.

With reference back to FIG. 2, the platen lift assembly 115 is definedto move the wafer 207 on the platen 209 from the wafer rotation plane,i.e., the plane where the wafer is engaged by the drive rollers 701 andstabilizer roller 605, to the processing position where the platen 209engages a seal of the fluid bowl 211. FIG. 5 is an illustration showinga vertical cross-section through the platen 209 and fluid bowl 211 withthe platen 209 in a fully lowered position, in accordance with oneembodiment of the present invention. The platen 209 is defined as aheated vacuum chuck. In one embodiment, the platen 209 is fabricatedfrom a chemically inert material. In another embodiment, the platen 209is coated with a chemically inert material. The platen 209 includesvacuum channels 907 connected to a vacuum supply 911, which uponactuation will vacuum clamp the wafer 207 to the platen 209. Vacuumclamping of the wafer 207 to the platen 209 decreases a thermalresistance between the platen 209 and the wafer 207 and also preventsthe wafer 207 from sliding during vertical transport within the chamber100.

In various embodiments, the platen 209 can be defined to accommodate a200 mm wafer or a 300 mm wafer. Additionally, it should be appreciatedthat the platen 209 and chamber 100 can be defined to accommodateessentially any size wafer. For a given wafer size, a diameter of theplaten 209 upper surface, i.e., clamping surface, is defined to beslightly less than a diameter of the wafer. This platen-to-wafer sizingarrangement enables the edge of the wafer to extend slightly beyond theupper peripheral edge of the platen 209, thus enabling engagementbetween the wafer edge and each of the stabilizer roller 605 and driverollers 701 when the wafer is sitting upon the platen 209.

As previously mentioned, the electroless plating process is atemperature sensitive process. The platen 209 is defined to be heated sothat the temperature of the wafer 207 can be controlled. In oneembodiment, the platen 209 is capable of maintaining a temperature up to100° C. Also, the platen 209 is capable of maintaining a temperature aslow as 0° C. It is anticipated that a normal platen 209 operatingtemperature will be about 60° C. In the embodiment where the platen 209is sized to accommodate a 300 mm wafer, the platen 209 is defined withtwo interior resistive heating coils so as to form an inner heating zoneand an outer heating zone, respectively. Each heating zone includes itsown control thermocouple. In one embodiment, the inner heating zoneutilizes a 700 Watt (W) resistive heating coil, and the outer zoneutilizes a 2000 W resistive heating coil. In the embodiment where theplaten 209 is sized to accommodate a 200 mm wafer, the platen 209includes a single heating zone defined by a 1250 W interior heating coiland corresponding control thermocouple.

The fluid bowl 211 is defined to receive the platen 209 when the platen209 is fully lowered within the chamber 100. The fluid holdingcapability of the fluid bowl 211 is completed when the platen 209 islowered to engage a fluid bowl seal 909 defined about an inner peripheryof the fluid bowl 211. In one embodiment, the fluid bowl seal 909 is anenergized seal which forms a liquid tight seal between the platen 290and fluid bowl 211, when the platen 209 is lowered to fully contact thefluid bowl seal 909. It should be appreciated that when the platen 209is lowered to engage the fluid bowl seal 909, a gap exists between theplaten 209 and the fluid bowl 211. Thus, engagement of the platen 209with the fluid bowl seal 909 allows an electroplating solution to beinjected into the bowl so as to fill the gap that exists between theplaten 209 and the fluid bowl 211 above the fluid bowl seal 909, andwell-up over the periphery of the wafer 207 that is clamped on the uppersurface of the platen 209.

In one embodiment, the fluid bowl 211 includes eight fluid dispensenozzles for dispensing of the electroplating solution within the fluidbowl 211. The fluid dispense nozzles are distributed in a uniformlyspaced manner around the fluid bowl 211. Each of the fluid dispensenozzles is fed by a tube from a distribution manifold such that a fluiddispense rate from each fluid dispense nozzle is substantially the same.Also, the fluid dispense nozzles are disposed such that fluid emanatingfrom each of the fluid dispense nozzles enters the fluid bowl 211 at alocation below the upper surface of the platen 209, i.e., below thewafer 207 that is clamped on the upper surface of the platen 209.Additionally, when the platen 209 and wafer 207 are not present in thefluid bowl 211, the fluid bowl 211 can be cleaned by injecting acleaning solution into the fluid bowl 211 through the fluid dispensenozzles. The fluid bowl 211 can be cleaned at a user defined frequency.For example, the fluid bowl can be cleaned as frequently as afterprocessing of every wafer, or as infrequently as once every 100 wafers.

The chamber 100 also includes a rinse bar 901, which includes a numberof rinse nozzles 903 and a number of blowdown nozzles 905. The rinsenozzles 903 are directed to spray rinse fluid on the top surface of thewafer 207 when the platen 209 is moved to place the wafer 207 in rinseposition. At the rinse position, a space will exist between the platen209 and the fluid bowl seal 909 to enable flow of rinse fluid into thefluid bowl 211 from which it can be drained. In one embodiment, tworinse nozzles 903 are provided for rinsing a 300 mm wafer, and one rinsenozzle 903 is provided for rinsing a 200 mm wafer. The blowdown nozzles905 are defined to direct an inert gas, such as nitrogen, toward the topsurface of the wafer to assist in removing fluid from the top surface ofthe wafer during the rinsing process. It should be appreciated thatbecause the electroless plating reactions continuously occur when theelectroless plating solution is in contact with the wafer surface, it isnecessary to promptly and uniformly remove the electroless platingsolution from the wafer upon completion of the electroless platingperiod. To this end, the rinse nozzles 903 and blowdown nozzles 905enable prompt and uniform removal of the electroless plating solutionfrom the wafer 207.

Operations of the chamber 100 are supported by a fluid handling system(FHS). In one embodiment, the FHS is defined as a separate module fromthe chamber 100 and is connected in fluid communication with variouscomponents within the chamber 100. The FHS is defined to service theelectroless plating process, i.e., the fluid bowl dispense nozzles,rinse nozzles, and blowdown nozzles. The FHS is also defined to servicethe upper and lower prox heads 203/205. A mixing manifold is disposedbetween the FHS and the supply line that services each of the fluiddispense nozzles within the fluid bowl 211. Thus, the electrolessplating solution that flows to each of the fluid dispense nozzles withinthe fluid bowl 211 is pre-mixed prior to reaching the fluid bowl 211.

Fluid supply lines are disposed to fluidly connect the mixing manifoldto the various fluid dispense nozzles within the fluid bowl 211, suchthat the electroplating solution will flow into the fluid bowl 211 fromeach fluid dispense nozzle in a substantially uniform manner, e.g., at asubstantially uniform flow rate. The FHS is defined to enable a nitrogenpurge of the fluid supply lines disposed between the mixing manifold andthe fluid dispense nozzles within the fluid bowl 211, so as to enableclearing of the fluid supply lines of electroplating solution. The FHSis also defined to support the wafer rinsing process by providingrinsing fluid to each of the rinse nozzles 903 and by providing inertgas to each of the blowdown nozzles 905. The FHS is defined to enablemanual setting of a pressure regulator to control the liquid pressureemanating from the rinse nozzles 903.

The chamber 100 includes a number of fluid drain locations. In oneembodiment, three separate fluid drain locations are provided within thechamber 100: 1) a primary drain from the fluid bowl 211, 2) a chamberfloor drain, and 3) a platen vacuum tank drain. Each of these drains isconnected to a common facility drain provided within the FHS.

FIG. 6A is an illustration showing the wafer 207 in the wafer handoffposition within the chamber 100, in accordance with one embodiment ofthe present invention. The chamber 100 is operated to accept a waferfrom an exterior module, e.g., MTM, to which the chamber 100 isconnected. In one embodiment, the entry door 101 is lowered and thewafer 207 is input to the chamber 100 by way of a robotic wafer handlingdevice. When the wafer 207 is placed in the chamber 100, the driverollers 701 and the stabilizer roller 605 are in their fully retractedpositions. The wafer 207 is positioned in the chamber 100 such that theedge of the wafer 207 is proximate to the drive rollers 701 and thestabilizer roller 605. The drive rollers 701 and stabilizer roller 605are then moved toward the edge of the wafer 207 so as to engage the edgeof the wafer 207, as shown in FIG. 6A.

It should be appreciated that the wafer handoff position is also thewafer drying position within the chamber 100. The wafer handoff anddrying processes occur within an upper region 1007 of the chamber 100.The fluid bowl 211 resides in a lower region 1009 of the chamber 100,directly below the wafer-handoff position. This configuration enablesthe platen 209 to be raised and lowered to enable movement of the wafer207 from the wafer-handoff position to the wafer processing position inthe lower region 1009. During the wafer handoff process, the platen 209is in a fully lowered position to avoid interference of the platen 209with the robotic wafer handling device.

In one embodiment, the following conditions should be met within thechamber 100 prior to initiating placement of the wafer 207 within thechamber 100:

-   -   Verify that there is not already a wafer in the chamber.    -   Verify that the drive rollers 701 are in their fully retracted        position.    -   Verify that the stabilizer roller 605 is in its fully retracted        position.    -   Verify that liquid input into the chamber is turned off prior to        lowering the entry door 101.    -   Verify that the upper and lower prox heads 203/205 are in their        home positions on the prox head docking station 201.    -   Verify that the pressure within the chamber 100 is sufficiently        close to the pressure within the external module to which the        chamber 100 internal volume will be exposed when the chamber 100        is opened to receive the wafer 207. In one embodiment, a        sufficiently close pressure within the chamber 100 is within        +/−10 Torr of the external module pressure.    -   Verify that the oxygen content within the chamber 100 is        sufficiently close to the oxygen content within the external        module to which the chamber 100 internal volume will be exposed        when the chamber 100 is opened to receive the wafer 207. In one        embodiment, a sufficiently close oxygen content within the        chamber 100 is within +/−5 ppm of the external module oxygen        content.    -   Verify that entry door 101 is lowered.

The wafer 207 transfer sequence into the chamber 100 begins by openingthe rocker valve which seals the chamber 100 from the external module.Then, the wafer 207 is extended into the chamber 100 by way of therobotic wafer handling device, so that the wafer 207 is located at thewafer handoff position. The drive rollers 701 are then moved to theirfully extended position toward the edge of the wafer 207. The stabilizerroller 605 is then moved toward the wafer 207 so as to engage the edgeof the wafer 207 and cause the edge of the wafer 207 to also be engagedby the driver rollers 701. A positive engagement of the wafer 207 by thestabilizer roller 605 will indicate that the wafer 207 is present in itsproper position within the chamber 100. The robotic wafer handlingdevice is then lowered from the wafer 207 and retracted from the chamber100. The entry door 101 and rocker valve are then closed.

Following receipt of the wafer 207 within the chamber 100, the wafer 207is moved to the lower region 1009 of the chamber 100 for processing. Byway of the platen lift assembly 115 and shaft 801, the platen 209 isused to transport the wafer 207 from the upper region 1007 of thechamber 100 to the lower region 1009 of the chamber 207. FIG. 6B is anillustration showing the platen 209 raised to the wafer handoffposition, in accordance with one embodiment of the present invention.Prior to raising the platen 209, a verification is made that the upperand lower prox heads 203/205 are in their home positions. Also, prior toraising the platen 209, the wafer 207 can be rotated as necessary by wayof the drive rollers 701. The platen 209 is then raised to the waferpickup position. At the wafer pickup position, the vacuum supply to theplaten 209 is activated. The stabilizer roller 605 is moved to itsretracted position away from the wafer 207. Also, the drive rollers 701are moved to their retracted position away from the wafer 207. At thispoint the wafer 207 is vacuum chucked to the platen 209. In oneembodiment, the vacuum pressure of the platen is verified to be lessthan a maximum user specified value. If the vacuum pressure of theplaten is acceptable the wafer handoff process proceeds. Otherwise, thewafer handoff process aborts.

The platen 209 is heated to a user specified temperature, and the wafer207 is held on the platen 209 for a user specified duration to allow thewafer 207 to heat up. The platen 209 with wafer thereon is then loweredto a hovering position just above a position at which the platen 209would engage the fluid bowl seal 909, i.e., just above the sealingposition. FIG. 6C is an illustration showing the platen 209 in thehovering position just above the sealing position, in accordance withone embodiment of the present invention. The distance between the platen209 and the fluid bowl seal 909 in the hovering position is a userselectable parameter. In one embodiment, the distance between the platen209 and the fluid bowl seal 909 in the hovering position is within arange extending from about 0.05 inch to about 0.25 inch.

When the platen 209 with the wafer 207 thereon is in the hoveringposition, the electroless plating process can commence. Prior to theelectroless plating process, the FHS is operated to recirculate theelectroless plating chemicals in a pre-mixed state. While the platen 209is maintained in the hovering position, a flow of the electrolessplating solution 1003 into the fluid bowl 211 by way of fluid dispensenozzles 1001 is initiated. The flow of electroless plating solution 1003when the platen 209 is in the hovering position is referred to as astabilizing flow. During the stabilizing flow, the electroless platingsolution 1003 flows from the fluid dispense nozzles down between theplaten 209 and fluid bowl seal 909 into the fluid bowl 211 drain basin.The fluid dispense nozzles 1001 are disposed in a substantiallyuniformly spaced manner about a periphery of the fluid bowl 211 so as tobe positioned uniformly about a periphery of the underside of the platen209 when the platen 209 is lowered to engage the fluid bowl seal 909.Also, each of the fluid dispense nozzles 1001 is positioned so thatelectroless plating solution 1003 dispensed therefrom is dispensed at alocation below the wafer 207 held atop the platen 209.

The stabilizing flow allows the flow of electroless plating solution1003 to each of the fluid dispense nozzles 1001 to stabilize prior tolowering of the platen 209 to engage the fluid bowl seal 909. Thestabilizing flow continues until either a user specified amount of timehas elapsed or until a user specified volume of electroless platingsolution 1003 has been dispensed from the fluid dispense nozzles 1001.In one embodiment, the stabilizing flow continues for a period of timeextending from about 0.1 second to about 2 seconds. Also, in oneembodiment, the stabilizing flow continues until a volume of electrolessplating solution 1003 extending from about 25 mL to about 500 mL hasbeen dispensed from the fluid dispense nozzles 1001.

At the conclusion of the stabilizing flow, the platen 209 is lowered toengage the fluid bowl seal 909. FIG. 6D is an illustration showing theplaten 209 lowered to engage the fluid bowl seal 909 followingcompletion of the stabilizing flow, in accordance with one embodiment ofthe present invention. Upon engagement of the fluid bowl seal 909 by theplaten 209, the electroless plating solution 1003 flowing from the fluiddispense nozzles 1001 will fill the space between the fluid bowl 211 andthe platen 209 so as to well up and over the periphery of the wafer 207.Because the fluid dispense nozzles 1001 are substantially uniformlydisposed about the periphery of the platen 209, the electroless platingsolution 1003 will rise over the peripheral edge of the wafer in asubstantially uniform manner so as to flow from the periphery of thewafer 207 toward the center of the wafer 207 in a substantiallyconcentric manner.

In one embodiment, after the fluid bowl seal 909 has been engaged by theplaten 209, an additional volume of electroless plating solution 1003extending from about 200 mL to about 1000 mL is dispensed from the fluiddispense nozzles 1001. Dispensing of the additional electroless platingsolution 1003 may take from about 1 second to about 10 seconds.Following the dispensing of the additional electroless plating solution1003 so as to cover the entire wafer 207 surface with electrolessplating solution 1003, a user defined period of time is allowed toelapse during which electroless plating reactions occur on the wafersurface.

Immediately following the user defined time period for electrolessplating reaction, the wafer 207 is subjected to a rinsing process. FIG.6E is an illustration showing the wafer 207 undergoing the rinsingprocess, in accordance with one embodiment of the present invention. Forthe rinsing process, the platen 209 is raised to a wafer rinse position.When the platen 209 is raised, the seal between the platen 209 and thefluid bowl seal 909 is broken, and the majority of the electrolessplating solution 1003 above the wafer 207 will flow to the fluid bowl211 drain basin. The remaining electroless plating solution 1003 on thewafer 207 is removed by dispensing a rinse fluid 1005 from the rinsenozzles 903 onto the wafer 207. In one embodiment, the rinse fluid 1005is deionized water (DIW). In one embodiment, the rinse nozzles 903 arefed from a single valve within the FHS. If necessary, the platen 209 canbe moved during the rinsing process. Additionally, an inert gas such asnitrogen can be dispensed from the blow down nozzles 905 to blow liquidoff of the wafer surface. The activation and duration of the rinse fluid1005 flow and the inert blow down gas flow are user specifiedparameters.

Following the wafer rinsing process, the wafer 207 is moved to the waferdrying position, which is the same as the wafer handoff position. Withreference back to FIG. 6B, the platen 209 is raised so as to positionthe wafer 207 proximate to the driver rollers 701 and stabilizer roller605. Prior to raising the platen 209 from the rinsing position, averification is made that the upper and lower prox heads 203/205 are intheir home positions, the drive rollers 701 are fully retracted, andstabilizer roller 605 is fully retracted. Once the wafer is raised tothe drying position, the drive rollers 701 are moved to their fullyextended position, and the stabilizer roller 605 is moved to engage theedge of the wafer 207 so as to also cause the drive rollers 701 toengage the edge of the wafer 207. At this point the vacuum supply to theplaten 209 is turned off and the platen is lowered slightly away fromthe wafer 207. Once the wafer 207 is verified as being securely held bythe driver rollers 701 and stabilizer roller 605, the platen 209 islowered to the fluid bowl sealing position, at which the platen 209remains for the duration of the wafer processing within the chamber.

FIG. 6F is an illustration showing the wafer 207 undergoing a dryingprocess by way of the upper and lower prox heads 203/205, in accordancewith one embodiment of the present invention. In one embodiment, flow tothe upper and lower prox heads 203/205 is initiated with the prox headsat the prox head docking station 201. In another embodiment, the upperand lower prox heads 203/205 are moved to the center of the wafer 207prior to initiating flow to the prox heads. To initiate flow to the proxheads 203/205, vacuum to both the upper and lower prox heads 203/205 isinitiated. Then, following a user defined period, nitrogen and isopropylalcohol (IPA) are flowed to the upper and lower prox heads 203/205 at arecipe defined flow rate, so as to form upper and lower dryingmeniscuses 1011A/1011B. If the flow is initiated at the prox headdocking station 201, the upper and lower prox heads 203/205 are moved tothe wafer center as the wafer is rotated. If the flow is initiated atthe wafer center, the upper and lower prox heads 203/205 are moved tothe wafer docking station 201 as the wafer is rotated. Wafer rotationduring the drying process is initiated at an initial rotation speed andadjusted as the prox heads 203/205 are scanned across the wafer. In oneembodiment, during the drying process, the wafer will be rotated a rateextending from about 0.25 revolution per minute (rpm) to about 10 rpm.The wafer rotation speed will vary as a function of the prox head203/205 radial position over the wafer. Also, a scanning speed of theupper and lower prox heads 203/205 is initiated at an initial scan speedand adjusted as the prox heads 203/205 are scanned across the wafer. Inone embodiment, the prox heads 203/205 are scanned across the wafer at arate extending from about 1 mm/sec to about 75 mm/sec. At the conclusionof the drying process, the upper and lower prox heads 203/205 are movedto the prox head docking station 201, the IPA flow to the prox heads203/205 is stopped, the nitrogen flow to the prox heads 203/205 isstopped, and the vacuum supply to the prox heads 203/205 is stopped.

During the drying process, the upper and lower prox heads 203/205 arepositioned in close proximity to a top surface 207A and a bottom surface207B of the wafer 207, respectively. Once in this position, the proxheads 203/205 may utilize the IPA and DIW source inlets and a vacuumsource outlet(s) to generate wafer processing meniscuses 1011A/1011B incontact with the wafer 207 which are capable of applying and removingfluids from the top and bottom surfaces of the wafer 207. The waferprocessing meniscuses 1011A/1011B may be generated in accordance withthe descriptions provided with regard to FIG. 7, where IPA vapor and DIWare input into the region between the wafer 207 and the prox heads203/205. At substantially the same time the IPA and DIW is input, avacuum may be applied in close proximity to the wafer surface to outputthe IPA vapor, the DIW, and the fluids that may be on a wafer surface.It should be appreciated that although IPA is utilized in the exemplaryembodiment, any other suitable type of vapor may be utilized such as anysuitable alcohol vapor, organic compounds, hexanol, ethyl glycol, etc.that may be miscible with water. Alternatives to IPA include but are notlimited to the following: diacetone, diaceton alcohol,1-methoxy-2-propanol, ethylglycol, methyl-pyrrolidon, ethyllactate,2-butanol. These fluids may also be known as surface tension reducingfluids. The surface tension reducing fluids act to increase the surfacetension gradient between the two surfaces (i.e., between the prox heads203/205 and the surface of the wafer 207.

The portion of the DIW that is in the region between the prox heads203/205 and the wafer 207 is the dynamic liquid meniscus 1101A/1011B. Itshould be appreciated that as used herein, the term “output” can referto the removal of fluid from a region between the wafer 207 and aparticular prox head 203/205, and the term “input” can be theintroduction of fluid to the region between the wafer 207 and theparticular prox head 203/205.

FIG. 7 is an illustration showing an exemplary process that may beconducted by a prox head 203/205, in accordance with one embodiment ofthe present invention. Although FIG. 7 shows a top surface 207A of thewafer 207 being processed, it should be appreciated that the process maybe accomplished in substantially the same way for a bottom surface 207Bof the wafer 207. While FIG. 7 illustrates a substrate drying process,many other fabrication processes (e.g., etching, rinsing, cleaning,etc.) may also be applied to the wafer surface in a similar manner. Inone embodiment, a source inlet 1107 may be utilized to apply isopropylalcohol (IPA) vapor toward the top surface 207A of the wafer 207, and asource inlet 1111 may be utilized to apply deionized water (DIW) towardthe top surface 207A. In addition, a source outlet 1109 may be utilizedto apply vacuum to a region in close proximity to the surface 207A toremove fluid or vapor that may located on or near the surface 207A.

It should be appreciated that any suitable combination of source inletsand source outlets may be utilized as long as at least one combinationexists where at least one of the source inlet 1107 is adjacent to atleast one of the source outlet 1109 which is in turn adjacent to atleast one of the source inlet 1111. The IPA may be in any suitable formsuch as, for example, IPA vapor where IPA in vapor form is inputtedthrough use of a nitrogen carrier gas. Moreover, although DIW isutilized herein, any other suitable fluid may be utilized that mayenable or enhance the substrate processing such as, for example, waterpurified in other ways, cleaning fluids, and other processing fluids andchemistries. In one embodiment, an IPA inflow 1105 is provided throughthe source inlet 1107, a vacuum 1113 is applied through the sourceoutlet 1109, and DIW inflow 1115 is provided through the source inlet1111. If a fluid film resides on the wafer 207, a first fluid pressuremay be applied to the substrate surface by the IPA inflow 1105, a secondfluid pressure may be applied to the substrate surface by the DIW inflow1115, and a third fluid pressure may be applied by the vacuum 1113 toremove the DIW, IPA, and the fluid film on the substrate surface.

It should be appreciated that by controlling the fluid flow amount ontothe wafer surface 207A and by controlling the vacuum applied, themeniscus 1011A may be managed and controlled in any suitable manner. Forexample, in one embodiment, by increasing the DIW flow 1115 and/ordecreasing the vacuum 1113, the outflow through the source outlet 1109may be nearly all DIW and the fluids being removed from the wafersurface 207A. In another embodiment, by decreasing the DIW flow 1115and/or increasing the vacuum 1113, the outflow through the source outlet1109 may be substantially a combination of DIW and IPA as well as fluidsbeing removed from the wafer surface 207A.

Following the wafer drying process, the wafer 207 can be returned to theexternal module, e.g., MTM. In one embodiment, the following conditionsshould be met within the chamber 100 prior to initiating the wafertransfer back to the external module:

-   -   Verify that liquid input into the chamber is turned off prior to        lowering the entry door 101.    -   Verify that entry door 101 is lowered.    -   Verify that the upper and lower prox heads 203/205 are in their        home positions on the prox head docking station 201.    -   Verify that the pressure within the chamber 100 is sufficiently        close to the pressure within the external module to which the        chamber 100 internal volume will be exposed when the chamber 100        is opened to receive the wafer 207. In one embodiment, a        sufficiently close pressure within the chamber 100 is within        +/−10 Torr of the external module pressure.    -   Verify that the oxygen content within the chamber 100 is        sufficiently close to the oxygen content within the external        module to which the chamber 100 internal volume will be exposed        when the chamber 100 is opened to receive the wafer 207. In one        embodiment, a sufficiently close oxygen content within the        chamber 100 is within +/−5 ppm of the external module oxygen        content.

The process of transferring the wafer back to the external moduleincludes opening of the rocker valve which seals the chamber 100 fromthe external module. Then, the robotic wafer handling device is insertedinto the chamber at a position so as to retrieve the wafer from thewafer drying position. The stabilizer roller 605 is then moved away fromthe wafer 207 to its fully retracted position. The drive rollers 701 arethen moved to their fully retracted position away from the wafer 207. Atthis point, the wafer is held by the robotic handling device. Therobotic wafer handling device with the wafer held thereon is thenretracted from the chamber 100. The entry door 101 and rocker valve arethen closed.

FIG. 8 is an illustration showing a cluster architecture 1200, inaccordance with one embodiment of the present invention. The clusterarchitecture 1200 includes a controlled ambient transfer module 1201,i.e., a managed transfer module (MTM) 1201. The MTM 1201 is connected toa load lock 1205 by way of a slot valve 1209E. The MTM 1201 includes arobotic wafer handling device 1203, i.e., end effector 1203, that iscapable of retrieving a wafer from the load lock 1205. The MTM 1201 isalso connected with a number of process modules 1207A, 1207B, 1207C, and1207D through respective slot valves 1209A, 1209B, 1209C, and 1209D. Inone embodiment, the processing modules 1207A-1207D are controlledambient wet processing modules. The controlled ambient wet processingmodules 1207A-1207D are configured to process a surface of a wafer in acontrolled inert ambient environment. The controlled inert ambientenvironment of the MTM 1203 is managed such that an inert gas is pumpedinto the MTM 1203, and oxygen is purged out of the MTM 1203. In oneembodiment, the electroless plating chamber 100 can be connected to theMTM 1203 as a processing module. For example, FIG. 8 shows thatprocessing module 1207A is actually the dry-in/dry-out electrolessplating chamber 100.

By removing all or most of the oxygen from the MTM 1203 and replacing itwith an inert gas, the MTM 1203 will provide a transition environmentwhich does not expose a just-processed wafer before or after anelectroless plating process is performed thereon in the chamber 100. Inspecific embodiments, the other processing modules 1207B-1207D may beelectroplating modules, electroless plating modules, dry-in/dry-out wetprocess modules, or other types of modules that will enable theapplication, formation, removal, or deposition of a layer on top of awafer surface or feature, or other types of wafer processing.

In one embodiment, monitoring and control of the chamber 100 andinterfacing equipment, e.g., FHS, is provided through a graphical userinterface (GUI) operating on a computer system that is remotely locatedwith respect to the processing environment. Various sensors within thechamber 100 and interfacing equipment are connected to provide a readout in the GUI. Each electronically actuated control within the chamber100 and interfacing equipment can be actuated through the GUI. The GUIis also defined to display warnings and alarms based on various sensorreadings within the chamber 100 and interfacing equipment. The GUI isfurther defined to indicate a process state and system conditions.

The chamber 100 of the present invention incorporates a number ofadvantageous features. For example, the implementation of upper andlower prox heads 203/205 within the chamber 100 provides the chamber 100with a dry-in/dry-out wafer electroless plating process capability. Thedry-in/dry-out capability enables the chamber 100 to interface with theMTM, enables tighter control of chemical reactions on the wafer surface,and prevents the carrying of chemicals outside of the chamber 100.

The double walled configuration of the chamber 100 also providesadvantages. For example, the outer structural wall provides for strengthand interface precision, while the inner liner provides a chemicalboundary to keep chemicals from reaching the outer structural wall.Because the outer structure wall is responsible for providing the vacuumboundary, the inner liner does not have to be capable of providing avacuum boundary, thus enabling the inner wall to be fabricated frominert materials such as plastic. Additionally, the inner wall isremovable to facilitate chamber 100 cleaning or re-equipping. Also, thestrength of the outer wall enables a decrease in time required toachieve an inert ambient condition within the chamber 100.

The chamber 100 provides for control of ambient conditions within thechamber 100. Use of an inert ambient condition during drying enablescreation of a surface tension gradient (STG) which in turn enables theprox head processes. For example, a carbon dioxide ambient condition canbe established within the chamber 100 to assist with creation of STGduring the prox head drying process. The integration of STG drying,i.e., prox head drying, within a wet process chamber, i.e., within anelectroless plating chamber, enables a multi-stage process capability.For example, the multi-stage process may include a pre-clean operationby way of the prox heads in the upper region of the chamber, anelectroless plating process in the lower region of the chamber, andpost-clean and drying operations by way of the prox heads in the upperregion of the chamber.

Furthermore, the chamber 100 is configured to minimize an amount ofrequired electroless plating solution, thereby enabling use ofsingle-shot chemistry, i.e., single use and discard chemistry. Also, apoint of use mixing approach is implemented to control electrolyteactivation before deposition on wafer. This is accomplished by use ofthe mixing manifold which incorporates an injector tube, where theactivating chemistry is injected into a flow stream of chemicalssurrounding the injector tube, as close as possible to the fluid bowldispense locations. This increases reactant stability, and reducesdefects. Additionally, the quenching rinse capability of the chamber 100provides for greater control over electroless plating reaction time onthe wafer. The chamber 100 is further configured to be easily cleaned byintroducing a “backflush” chemistry into the limited volume of the fluidbowl. The “backflush” chemistry is formulated to remove metalcontaminants that may be introduced by the electroless plating solution.In other embodiments, the chamber 100 can be further configured toincorporate various types of in-situ metrology. Also, in someembodiments, the chamber 100 can include radiant or absorptive heatingsources to initiate electroless plating reactions on the wafer.

While this invention has been described in terms of several embodiments,it will be appreciated that those skilled in the art upon reading thepreceding specifications and studying the drawings will realize variousalterations, additions, permutations and equivalents thereof. Therefore,it is intended that the present invention includes all such alterations,additions, permutations, and equivalents as fall within the true spiritand scope of the invention.

1. A semiconductor wafer electroless plating apparatus, comprising: aplaten having a top surface defined to support a wafer, the platenincluding an outer surface extending downward from a periphery of thetop surface to a lower surface of the platen; a fluid bowl having aninner volume defined by an interior surface, the fluid bowl configuredto receive the platen and wafer to be supported thereon within the innervolume; a seal disposed around the interior surface of the fluid bowl soas to form a liquid tight barrier when engaged between the interiorsurface of the fluid bowl and the outer surface of the platen; and anumber of fluid dispense nozzles positioned to dispense electroplatingsolution within the fluid bowl at a number of respective locations abovethe seal.
 2. A semiconductor wafer electroless plating apparatus asrecited in claim 1, wherein the outer surface of the platen is definedto have a shape that is complementary to the interior surface of fluidbowl.
 3. A semiconductor wafer electroless plating apparatus as recitedin claim 1, wherein the platen is defined to fit within the inner volumeof the fluid bowl such that when the platen engages the seal a liquidretaining volume is defined between the outer surface of the platen andthe interior surface of the fluid bowl.
 4. A semiconductor waferelectroless plating apparatus as recited in claim 1, wherein the numberof fluid dispense nozzles are disposed in a substantially uniformlyspaced manner around the seal.
 5. A semiconductor wafer electrolessplating apparatus as recited in claim 1, wherein the platen is definedto includes a number of vacuum channels fluidly connected to a vacuumsupply so as to provide a wafer vacuum chucking capability.
 6. Asemiconductor wafer electroless plating apparatus as recited in claim 1,further comprising: a platen lift assembly defined to include a shaftconnected to the lower surface of the platen and mechanics defined toenable vertical movement of the shaft and platen, wherein the fluid bowlis defined to include an opening at a central region of the interiorsurface through which the shaft is disposed and moveable.
 7. Asemiconductor wafer electroless plating apparatus as recited in claim 1,further comprising: a rinse bar defined to include a number of rinsenozzles, the rinse bar disposed above the fluid bowl so as to enabledispersion of a rinsing fluid from the number of rinse nozzles towardthe top surface of the platen when the platen is positioned within thefluid bowl.
 8. A system for semiconductor wafer electroless plating,comprising: a platen defined to have an upper surface for supporting awafer and an outer surface extending downward from the upper surface; afluid bowl defined to receive the platen and wafer to be supportedthereon so as to form a liquid retaining volume between an inner surfaceof the fluid bowl and the outer surface of the platen; a number of fluiddispense nozzles defined to dispense fluid within the liquid retainingvolume at locations below the upper surface of the platen; and a fluidhandling system in fluid communication with the number of fluid dispensenozzles, the fluid handling system defined to flow an electrolessplating solution to and through the number of fluid dispense nozzles soas to fill the liquid retaining volume with the electroless platingsolution and cause the electroless plating solution to rise up and flowover the platen so as to flow over a wafer to be supported on the uppersurface of the platen.
 9. A system for semiconductor wafer electrolessplating as recited in claim 8, wherein the platen is defined to includea heating coil connected to a thermal control device.
 10. A system forsemiconductor wafer electroless plating as recited in claim 8, whereinthe outer surface of the platen is defined to have a substantiallyconstant downward and inward slope from a periphery of the upper surfaceof the platen to a lower surface of the platen.
 11. A system forsemiconductor wafer electroless plating as recited in claim 8, furthercomprising: a seal disposed on the inner surface of the fluid bowl so asto engage the outer surface of the platen to form the liquid retainingvolume between the inner surface of the fluid bowl and the outer surfaceof the platen.
 12. A system for semiconductor wafer electroless platingas recited in claim 11, wherein the number of fluid dispense nozzles aredisposed above the seal in a substantially uniformly spaced manner. 13.A system for semiconductor wafer electroless plating as recited in claim8, further comprising: a platen lift assembly defined to include a shaftconnected to the platen and mechanics defined to enable verticalmovement of the shaft and platen, wherein the fluid bowl is defined toinclude an opening at a central region of the inner surface throughwhich the shaft is disposed and moveable.
 14. A system for semiconductorwafer electroless plating as recited in claim 8, wherein the platen andfluid bowl are disposed within an ambient controlled chamber, and thefluid handling system is disposed outside the ambient controlledchamber.
 15. A method for semiconductor wafer electroless plating,comprising: supporting a wafer on a platen; dispensing an electrolessplating solution within a liquid retaining volume defined around theplaten and at a location below the wafer, wherein the electrolessplating solution is dispensed to fill the liquid retaining volume andrise up and flow over a top surface of the wafer in a substantiallyuniform manner extending inward from a periphery of the top surface ofthe wafer to a center of the top surface of the wafer; draining theelectroless plating solution from the liquid retaining volume so as toremove most of the electroless plating solution from the top surface ofthe wafer; and rinsing the top surface of the wafer immediately upondraining the electroless plating solution from the liquid retainingvolume.
 16. A method for semiconductor wafer electroless plating asrecited in claim 15, further comprising: lowering the platen into afluid bowl so as to engage a seal between the platen and the fluid bowlto form the liquid retaining volume defined around the platen and at thelocation below the wafer.
 17. A method for semiconductor waferelectroless plating as recited in claim 16, further comprising: prior tolowering the platen, dispensing an amount of the electroless platingsolution past the seal so as to flow outside of the liquid retainingvolume and so as to stabilize a flow the electroless plating solution.18. A method for semiconductor wafer electroless plating as recited inclaim 16, wherein draining the electroless plating solution from theliquid retaining volume is performed by raising the platen so as todisengage the seal between the platen and the fluid bowl.
 19. A methodfor semiconductor wafer electroless plating as recited in claim 15,further comprising: heating the platen in a controlled manner; andcontrolling an ambient condition to which the wafer and electrolessplating solution is exposed.
 20. A method for semiconductor waferelectroless plating as recited in claim 15, further comprising: afterrinsing the top surface of the wafer, subjecting the wafer to aproximity drying process, wherein dispensing the electroless platingsolution, draining the electroless plating solution, rinsing the topsurface of the wafer, and subjecting the wafer to the proximity dryingprocess are performed within a shared ambient volume.